Continuum-Source Cavity-Enhanced Optical Flux Monitoring to Control Thin Layer Deposition Processes

Roman Rousseau

1:00 PM - 2:30 PM

[TH-PS-53] Continuum-Source Cavity-Enhanced Optical Flux Monitoring to Control Thin Layer Deposition Processes

Roman Rousseau¹, Claude Botella¹, Jerome Morville², Mohamed Bounab¹, Clarisse Furgeaud¹, Romain Bachelet¹, 〇Guillaume Saint-Girons¹ (1. INL-UMR5270/CNRS, Ecole Centrale de Lyon (France), 2. ILM-UMR5306/CNRS, UCBL (France))

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Presentation information

MBE Fundamentals, Innovations, and Production

[TH-PS-53] Continuum-Source Cavity-Enhanced Optical Flux Monitoring to Control Thin Layer Deposition Processes

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