ICMBE2024

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Oral presentation

Oxides

Oxides 1

Tue. Sep 10, 2024 3:15 PM - 4:30 PM International Conference Hall (Hall A) (3F)

Chair:Oliver Bierwagen (Paul Drude Institut, Germany)

4:15 PM - 4:30 PM

[TU-A2-04] Effects of Nitrogen Radical Irradiation to Ga2O3 (100) Surface and Its Application to Vertical Ga2O3 FinFETs

〇Zhenwei Wang1, Sandeep Kumar1, Takafumi Kamimura1, Shota Sato2, Kohki Eguchi2, Kura Nakaoka2, Syoki Taniguchi2, Hisashi Murakami3, Yoshinao Kumagai3, Masataka Higashiwaki1,2 (1. National Inst. of Info. and Communications Tech. (Japan), 2. Department of Physics and Electronics, Osaka Metropolitan Univ. (Japan), 3. Department of Applied Chemistry, Tokyo Univ. of Agriculture and Tech. (Japan))

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