Wafer Bowing Control of Extended Wavelength InGaAs Photodetector Materials by Strain Tailoring

Bowen Liu

1:00 PM - 2:30 PM

[TU-PS-07] Wafer Bowing Control of Extended Wavelength InGaAs Photodetector Materials by Strain Tailoring

〇Bowen Liu^1,2, Yi Gu^1,2, Pingping Chen^1,2, Yingjie Ma^1,2, Chunlei Yu^1,2, Tao Li^1,2, Xiumei Shao^1,2, Xue Li^1,2, Haimei Gong^1,2 (1. Shanghai Inst. of Technical Physics, Chinese Academy of Sci. (China), 2. Univ. of Chinese Academy of Sci. (China))

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Presentation information

III-V Semiconductors

[TU-PS-07] Wafer Bowing Control of Extended Wavelength InGaAs Photodetector Materials by Strain Tailoring

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