The 24th Congress of the International Commission for Optics

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Oral Presentation

03: Optical Metrology

[F1A] Polarization and Scattering

Fri. Aug 25, 2017 9:10 AM - 11:25 AM Room A (FUJI) (42F)

Session Chair:K. Oka(Hirosaki Univ.)

10:55 AM - 11:10 AM

[F1A-07] Analyses of Quality and Optical Processes of Diffraction Gratings by Optical Scatterometry

○R. Antos 1, M. Veis 1, J. Mistrik 2, K. Palka 2, P. Janicek 2, M. Karlovec 2, M. Vlcek 2 (1.Charles Univ. (Czech Republic), 2.Univ. of Pardubice (Czech Republic))

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