The 24th Congress of the International Commission for Optics

Presentation information

Oral Presentation

03: Optical Metrology

[F1A] Polarization and Scattering

Fri. Aug 25, 2017 9:10 AM - 11:25 AM Room A (FUJI) (42F)

Session Chair:K. Oka(Hirosaki Univ.)

10:55 AM - 11:10 AM

[F1A-07] Analyses of Quality and Optical Processes of Diffraction Gratings by Optical Scatterometry

R. Antos 1, M. Veis 1, J. Mistrik 2, K. Palka 2, P. Janicek 2, M. Karlovec 2, M. Vlcek 2 (1.Charles Univ. (Czech Republic), 2.Univ. of Pardubice (Czech Republic))

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