Analyses of Quality and Optical Processes of Diffraction Gratings by Optical Scatterometry

R. Antos

10:55 〜 11:10

[F1A-07] Analyses of Quality and Optical Processes of Diffraction Gratings by Optical Scatterometry

^○R. Antos ¹, M. Veis ¹, J. Mistrik ², K. Palka ², P. Janicek ², M. Karlovec ², M. Vlcek ² (1.Charles Univ. (Czech Republic), 2.Univ. of Pardubice (Czech Republic))

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[F1A] Polarization and Scattering

[F1A-07] Analyses of Quality and Optical Processes of Diffraction Gratings by Optical Scatterometry

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