The 24th Congress of the International Commission for Optics

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Poster Session

14: Optoelectronics and Photonic Devices

[P14] 14: Optoelectronics and Photonic Devices

Tue. Aug 22, 2017 3:30 PM - 5:30 PM Room P (HANA) (4F)

3:30 PM - 5:30 PM

[P14-09] Single Step ICP (Inductively Coupled Plasmas) Dry-Etching Condition for Lateral pin Waveguide

○Y. Morita 1, H. Jiang 1, K. Hamamoto 1 (1.Kyushu Univ. (Japan))

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