The 24th Congress of the International Commission for Optics

講演情報

Poster Session

14: Optoelectronics and Photonic Devices

[P14] 14: Optoelectronics and Photonic Devices

2017年8月22日(火) 15:30 〜 17:30 Room P (HANA) (4F)

15:30 〜 17:30

[P14-09] Single Step ICP (Inductively Coupled Plasmas) Dry-Etching Condition for Lateral pin Waveguide

Y. Morita 1, H. Jiang 1, K. Hamamoto 1 (1.Kyushu Univ. (Japan))

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