Investigation on Mg ion implantation for carrier-depletion InGaAsP optical modulator with vertical PN junction

N. Sekine

講演情報

Oral Presentation

14: Optoelectronics and Photonic Devices

[Th1J] Optoelectronic Devices and Materials

2017年8月24日(木) 09:10 〜 11:40 Room J (COMET) (43F)

Session Chair:J.P. Reithmaier(Univ. of Kassel), K. Takeda(NTT Device Technology Lab.)

09:55 〜 10:10

[Th1J-04] Investigation on Mg ion implantation for carrier-depletion InGaAsP optical modulator with vertical PN junction

^○N. Sekine ¹, J.-H. Han ¹, S. Takagi ¹, M. Takenaka ¹ (1.Univ.of Tokyo (Japan))

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講演情報

[Th1J] Optoelectronic Devices and Materials

[Th1J-04] Investigation on Mg ion implantation for carrier-depletion InGaAsP optical modulator with vertical PN junction

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