The 24th Congress of the International Commission for Optics

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Oral Presentation

15: Optical MEMS and Micro-optics

[Th2G] Optical MEMS and Nanophotonics II

Thu. Aug 24, 2017 1:00 PM - 3:00 PM Room G (ORION) (43F)

Session Chair:A. Higo(Univ. of Tokyo), K. Takahashi(Toyohashi Univ. of Tech.)

2:15 PM - 2:30 PM

[Th2G-04] A MEMS Fabry-Perot Interferometric Surface Stress Sensor for Chemical Sensing

○S. Maruyama 1, T. Hizawa 1, K. Takahashi 1, K. Sawada 1 (1.Toyohashi Univ. of Tech. (Japan))

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