The 24th Congress of the International Commission for Optics

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Oral Presentation

15: Optical MEMS and Micro-optics

[Th2G] Optical MEMS and Nanophotonics II

Thu. Aug 24, 2017 1:00 PM - 3:00 PM Room G (ORION) (43F)

Session Chair:A. Higo(Univ. of Tokyo), K. Takahashi(Toyohashi Univ. of Tech.)

2:45 PM - 3:00 PM

[Th2G-06] Photolithography Based Nano-Gap Formation Realized by Additional Pattern Transfer on UV-Cured Resist

H.M. Nguyen 1, M. Kumeuchi 1, S. Kumagai 1, ○M. Sasaki 1 (1.Tokyo Tech (Japan))

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