The 24th Congress of the International Commission for Optics

講演情報

印刷

Oral Presentation

01: Optical Design, Optical Materials, and Photo Lithography

[Tu2B] Optical Design and Optical Materials

2017年8月22日(火) 13:00 〜 15:00 Room B (MITAKE) (42F)

Session Chair:M. Shibuya(Tokyo Polytechnic Univ.), C.W. Liang(National Central Univ.)

14:00 〜 14:15

[Tu2B-03] Three-beam interference exposure of double-period grating for CRIGF

○K. Mori 1, K.J. Lee 2, Y.H. Ko 2, D. Carney 2, R. Magnusson 2, K. Kintaka 3, J. Inoue 1, S. Ura 1 (1.Kyoto Inst. Tech. (Japan), 2.Univ. Texas Arlington (USA), 3.AIST (Japan))

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