The 24th Congress of the International Commission for Optics

Presentation information

Oral Presentation

03: Optical Metrology

[W1A] Spectroscopy

Wed. Aug 23, 2017 1:00 PM - 3:00 PM Room A (FUJI) (42F)

Session Chair:Z. Zheng(Beihang Univ.)

2:30 PM - 2:45 PM

[W1A-06] Enlarging Measurable Range of Film Thickness by Interpolating Sample Reflective Spectrum

F. Lei 1,2, J. Cheng 1, X. Bian 1, M. Itoh 2 (1.Huaiyin Normal Univ. (China), 2.Univ. of Tsukuba (Japan))

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