The 24th Congress of the International Commission for Optics

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Oral Presentation

03: Optical Metrology

[W1A] Spectroscopy

2017年8月23日(水) 13:00 〜 15:00 Room A (FUJI) (42F)

Session Chair:Z. Zheng(Beihang Univ.)

14:30 〜 14:45

[W1A-06] Enlarging Measurable Range of Film Thickness by Interpolating Sample Reflective Spectrum

○F. Lei 1,2, J. Cheng 1, X. Bian 1, M. Itoh 2 (1.Huaiyin Normal Univ. (China), 2.Univ. of Tsukuba (Japan))

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