Gas separation 4

[O2.GS-02] Polymer-supported silica-based membranes for gas separation via atmospheric-pressure plasma-enhanced chemical vapor deposition

*Hiroki Nagasawa¹, Mitsugu Kawasaki¹, Masakoto Kanezashi¹, Toshinori Tsuru¹ (1. Hiroshima University)

キーワード：Microporous silica membrane, Polymer-supported ceramic membrane, Plasma-enhanced CVD