Gas separation 5

[O2.GS-06] Highly selective size-sieving gas separation membranes by plasma-enhanced chemical vapor deposition

*Jens Rubner¹, Felix Schott¹, Hannah Roth^1,3, Lara Kleines², Rainer Dahlmann², Matthias Wessling^1,3 (1. Chemical Process Engineering AVT.CVT, RWTH Aachen University, Forckenbeckstraße 51, 52074 Aachen, Germany, 2. Institute for Plastics Processing (IKV), RWTH Aachen University, Seffenter Weg 201, 52074 Aachen, Germany, 3. DWI—Leibniz-Institute for Interactive Materials, Forckenbeckstraße 50, 52074 Aachen, Germany)

キーワード：organosilica membranes, plasma-enhanced chemical vapor deposition, mixed gas permeation