Gas Separation

[P1-GS-17] Separation of hydrofluorocarbons using dimethoxydiphenylsilane-derived amorphous silica membranes prepared via CVD

*Yuna Kobori¹, Junya Suzuki¹, Shin-ichi Nakao¹, Xiao-lin Wang¹, Shuhei Yamaguchi², Takashi Namikawa², Akiyoshi Yamauchi², Kazuki Akamatsu¹ (1. Kogakuin University , 2. Daikin Industries, Ltd.)

キーワード：silica membrane, CVD, dimethoxydiphenysilane