Inorganic Membranes

[P1-IM-03] Fabrication of highly permselective silica membranes using atmospheric-pressure plasma jet CVD

*Tatsuhito Hamura¹, Hiroki Nagasawa¹, Masakoto Kanezashi¹, Toshinori Tsuru¹ (1. Hiroshima Univ.)

Keywords:Atmospheric Pressure Plasma, plasma CVD, Silica membrane