Inorganic Membranes

[P1-IM-04] Gas permeation property of silica membranes fabricated by atmospheric-pressure plasma-enhanced CVD: Effect of precursor species and their concentration

*Yosuke Kamogawa¹, Hiroki Nagasawa¹, Masakoto Kanezashi¹, Toshinori Tsuru¹ (1. Hiroshima Univ.)

Keywords:Plasma, CVD, silica membrane