Gas permeation property of silica membranes fabricated by atmospheric-pressure plasma-enhanced CVD: Effect of precursor species and their concentration

Presentation information

Inorganic Membranes

Membrane and Module Development

Mon. Jul 10, 2023 6:30 PM - 8:30 PM Poster Room 1 (CH1)

*Yosuke Kamogawa¹, Hiroki Nagasawa¹, Masakoto Kanezashi¹, Toshinori Tsuru¹ (1. Hiroshima Univ.)

Keywords:Plasma, CVD, silica membrane