Presentation information

Inorganic Membranes

Membrane and Module Development

Inorganic Membranes

Mon. Jul 10, 2023 6:30 PM - 8:30 PM Poster Room 1 (CH1)

[P1-IM-33] Precursors for SiC, SiC_xN_y and Si₃N₄ membrane formation

*Ralf Wyrwa¹, H. Richter¹, M. Weyd¹, A. Kansara¹, T. Block¹, I. Voigt¹ (1. Fraunhofer IKTS)

Keywords:SiCxNy, gas separation