Inorganic Membranes

[P1-IM-33] Precursors for SiC, SiC_xN_y and Si₃N₄ membrane formation

*Ralf Wyrwa¹, H. Richter¹, M. Weyd¹, A. Kansara¹, T. Block¹, I. Voigt¹ (1. Fraunhofer IKTS)

キーワード：SiCxNy, gas separation