P25

[P25-116] Using photo-activated localization microscopy (PALM) for imaging fluorophore-doped photoresists

*Madeline Rodenberg¹, Lukas Jonathan Münker², Rainer Tutsch³, Peter Jomo Walla⁴, Thomas Weimann⁵ (1. TU Braunschweig, Institute of Production Metrology (Germany), 2. TU Braunschweig, Institute of Physical and Theoretical Chemistry (Germany), 3. TU Braunschweig, Institute of Production Metrology (Germany), 4. TU Braunschweig, Institute of Physical and Theoretical Chemistry (Germany), 5. Physikalisch-Technische Bundesanstalt Braunschweig, Department Quantum Electronics (Germany))

キーワード：PALM, Superresolution Microscopy, Photoresist