セッション情報

Oral Sessions

B-3 Micro/Nano machining and figurings

[B-3-1] Surface processing of a μ-channel-cut crystal monochromator for reflection self-seeding of hard X-ray free-electron laser

〇Shotaro Matsumura¹、Shota Nakano¹、Yasuhisa Sano¹、Taito Osaka²、Ichiro Inoue²、Satoshi Matsuyama¹、Makina Yabashi²、Kazuto Yamauchi¹ (1.Osaka University、2.RIKEN SPring-8 Center)

[B-3-2] Numerically Controlled Plasma Chemical Vaporization Machining Using an Array-Type Electrode with an Intermittent Gas Flow System

〇Ryohei Asada¹、Ken Nishida¹、Shinya Okayama¹、Satoshi Matsuyama¹、Kazuto Yamauchi¹、Yasuhisa Sano¹ (1.Osaka University、2.Osaka University)

[B-3-3] An attempt of micro/nanofabrication of SiC single crystal with plasma electrolysis

〇Shunda Zhan^1,2、Jiajun Lu¹、Yonghua Zhao¹ (1.Southern University of Science and Technology、2.Harbin Institute of Technology)

[B-3-4] Performance Improvement in Dieless Punching of Ultrasmall-Diameter Holes

〇Shinya Araki¹、Hayata Hamafuji¹、Kai Egashira¹、Keishi Yamaguchi¹ (1.Kyoto Institute of Technology)

[B-3-5] Precise Simulation of Femtosecond Laser Processing Based on Identification of Ablation Parameters by On-Machine Measurement

〇Hiroyuki Kawakami¹、Shunsuke Nabetani¹、Masahiro Ueda^1,2、Hideki Aoyama ¹、Kazuo Yamazaki² (1.Keio University、2.University of California)

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