[D-1-1] Measurement of molar concentration spectrum for nanoparticle with multi-modal nanoparticle size distribution using nanoparticle chip

〇Jiaqing Zhu¹, Terutake Hayashi¹, Syuhei Kurokawa¹ (1.Kyushu University)

[D-1-2] Nano-scale THz Spectroscopic System for Thermal Evanescent Wave

〇Ryoko Sakuma¹, Kuan-Ting Lin¹, Sunmi Kim², Fuminobu Kimura¹, Yusuke Kajihara¹ (1.The University of Tokyo, 2.National Institute of Information and Communications Technology)

[D-1-3] Controlling the pulse duration of X ray free electron lasers with rotated inclined crystals

〇Shota Nakano¹, Taito Osaka², Shotaro Matsumura¹, Yasuhisa Sano¹, Kazuto Yamauchi¹, Makina Yabashi² (1.Osaka University, 2.RIKEN SPring-8 Center)

[D-1-4] Optical detection of fine particulate defects with autonomous search-and-split liquid probe

-Detection of nanoscale defects on Si wafer by highly sensitive observation system using phase contrast microscopy-

〇Chikara Odagiri¹, Shotaro Kadoya¹, Masaki Michihata¹, Kiyoshi Takamasu¹, Satoru Takahashi¹ (1.The University of Tokyo.)

[D-1-5] Detection of Surface Roughness by Ellipsometry based on Spin Hall Effect of Light

〇Zhehan Li¹, Yasuhiro Mizutani¹, Yasuhiro Takaya¹ (1.Osaka University)

[D-1-6] Dimensional measurement of micrometer-scale aperture using a surface interaction force detection type microprobe

〇Daichi Kato¹, So Ito¹, Kazuhide Kamiya¹, Kimihisa Matsumoto¹ (1.Toyama Prefectural University)

[D-1-7] Improving the spatial resolution of passive near-field microscope with a 10 nm-sharp tungsten probe apex

〇Hitomi Nakajima¹, Lin Kuan-Ting¹, Ryoko Sakuma¹, Fuminobu Kimura¹, Yusuke Kajihara¹ (1.The University of Tokyo)

[D-1-8] Improvement of environmental fluctuation in sinusoidal frequency modulation interferometer for sub-nano meter displacement measurement

〇Masato Higuchi¹, Tomohiro Sowa¹, Dong Wei¹, Masato Aketagawa¹ (1.Nagaoka University of Technology)

[D-1-9] Aspheric Optical Element Testing with the Three-dimensional Nanoprofiler Based on Normal Vector Tracing Method

〇Takeshi Ashizawa¹, Kota Hashimoto¹, Mikiya Ikuchi¹, Jungmin Kang², Katsuyoshi Endo¹ (1.Osaka University, 2.IMRAM, Tohoku University)

[D-1-10] Uncertainty evaluation of form error measurement of probe tip ball using a rotating reference sphere

〇So Ito¹, Daichi Kato¹, Daisuke Tsutsumi¹, Kazuhide Kamiya¹, Kimihisa Matsumoto¹ (1.Toyama Prefectural University)

[D-1-11] Calibration of Rotary Encoder Mounted on Non-Contact Three Dimensional Nano-profiler Using Normal Vector Tracing Method

〇Kota Hashimoto¹, Mikiya Ikuchi¹, Takeshi Ashizawa¹, Katsuyoshi Endo¹ (1.Osaka University)

[D-1-12] Comparison for pulse interval calibration of an optical frequency comb compressed by an etalon

〇Tatsuya Kume¹, Hiromasa Yasuda², Tsutomu Mibe¹, Masaki Michihata², Satoru Takahashi² (1.High Energy Accelerator Organization, 2.The University of Tokyo)

[D-1-13] Vibration insensitive single-shot interferometry using a wide-field laser microscope

〇Isami Nitta¹, Yosuke Tsukiyama¹ (1.Niigata University)

[D-1-14] Development of Apparatus for In-line Total Inspection of Burr and Dimension

Tatsuki Otsubo¹, 〇Wang Jingwei¹, Takanori Yazawa¹, Yosuke Miyazaki² (1.Nagasaki University, 2.YANMAR HOLDINGS CO., LTD.)

[D-1-15] Spatial-frequency-based evaluation of image reconstruction by structured-illumination microscopy with deep learning

〇Ren Ichikawa¹, Hiromasa Kume¹, Masatoshi Nishikawa², Shotaro Kadoya¹, Masaki Michihata¹, Kiyoshi Takamasu¹, Satoru Takahashi¹ (1.The University of Tokyo, 2.Hosei University)

[D-1-16] Fabrication of Three Dimensional High Aspect Ratio Structure by Oblique incident Talbot Lithography

〇Ryu Ezaki¹, Yasuhiro Mizutani¹, Yoshihiko Makiura², Yasuhiro Takaya¹ (1.Osaka University, 2.KURABO INDUSTRIES LTD.,)

[D-1-17] Observatory of Nano-scale Polishing Phenomena during SiO₂-CMP process by Compact Apparatus applying Optical Evanescent Field

〇Thitipat Permpatdechakul¹, Panart Khajornrungruang¹, Keisuke Suzuki¹, Aran Blattler¹ (1.Kyushu Institute of Technology)

Session information

D-1 Nano-scale measurements and calibrations