〇Jiaqing Zhu1、Terutake Hayashi1、Syuhei Kurokawa1 (1.Kyushu University)
セッション情報
Oral Sessions
D-1 Nano-scale measurements and calibrations
〇Ryoko Sakuma1、Kuan-Ting Lin1、Sunmi Kim2、Fuminobu Kimura1、Yusuke Kajihara1 (1.The University of Tokyo、2.National Institute of Information and Communications Technology)
〇Shota Nakano1、Taito Osaka2、Shotaro Matsumura1、Yasuhisa Sano1、Kazuto Yamauchi1、Makina Yabashi2 (1.Osaka University、2.RIKEN SPring-8 Center)
[D-1-4] Optical detection of fine particulate defects with autonomous search-and-split liquid probe
-Detection of nanoscale defects on Si wafer by highly sensitive observation system using phase contrast microscopy-
〇Chikara Odagiri1、Shotaro Kadoya1、Masaki Michihata1、Kiyoshi Takamasu1、Satoru Takahashi1 (1.The University of Tokyo.)
〇Zhehan Li1、Yasuhiro Mizutani1、Yasuhiro Takaya1 (1.Osaka University)
〇Daichi Kato1、So Ito1、Kazuhide Kamiya1、Kimihisa Matsumoto1 (1.Toyama Prefectural University)
〇Hitomi Nakajima1、Lin Kuan-Ting1、Ryoko Sakuma1、Fuminobu Kimura1、Yusuke Kajihara1 (1.The University of Tokyo)
〇Masato Higuchi1、Tomohiro Sowa1、Dong Wei1、Masato Aketagawa1 (1.Nagaoka University of Technology)
〇Takeshi Ashizawa1、Kota Hashimoto1、Mikiya Ikuchi1、Jungmin Kang2、Katsuyoshi Endo1 (1.Osaka University、2.IMRAM, Tohoku University)
〇So Ito1、Daichi Kato1、Daisuke Tsutsumi1、Kazuhide Kamiya1、Kimihisa Matsumoto1 (1.Toyama Prefectural University)
〇Kota Hashimoto1、Mikiya Ikuchi1、Takeshi Ashizawa1、Katsuyoshi Endo1 (1.Osaka University)
〇Tatsuya Kume1、Hiromasa Yasuda2、Tsutomu Mibe1、Masaki Michihata2、Satoru Takahashi2 (1.High Energy Accelerator Organization、2.The University of Tokyo)
〇Isami Nitta1、Yosuke Tsukiyama1 (1.Niigata University)
Tatsuki Otsubo1、〇Wang Jingwei1、Takanori Yazawa1、Yosuke Miyazaki2 (1.Nagasaki University、2.YANMAR HOLDINGS CO., LTD.)
〇Ren Ichikawa1、Hiromasa Kume1、Masatoshi Nishikawa2、Shotaro Kadoya1、Masaki Michihata1、Kiyoshi Takamasu1、Satoru Takahashi1 (1.The University of Tokyo、2.Hosei University)
〇Ryu Ezaki1、Yasuhiro Mizutani1、Yoshihiko Makiura2、Yasuhiro Takaya1 (1.Osaka University、2.KURABO INDUSTRIES LTD.,)
〇Thitipat Permpatdechakul1、Panart Khajornrungruang1、Keisuke Suzuki1、Aran Blattler1 (1.Kyushu Institute of Technology)