Session information

Oral Sessions

D-2 Surface metrologies of nano-scale structures

[D-2-1] Nano-Groove Formation on Si(111) Surfaces by Chemical Etching Assisted by Ag Nanowires

〇Zhida Ma¹, Seiya Masumoto¹, Kentaro Kawai¹, Kazuya Yamamura¹, Kenta Arima¹ (1.Osaka University)

[D-2-2] Energy dissipation of electrical stimulated graphene construction

〇Hao Zhang¹, Kuan-Ting Lin¹, Yusuke Kajihara¹ (1.University Tokyo)

[D-2-3] Formation of Graphene with Low Pit Density on SiC Assisted by Plasma Oxidation and Its Characterization

〇Makoto Ochi¹, Ouki Minami¹, Yasuhisa Sano¹, Kentaro Kawai¹, Kazuya Yamamura¹, Kenta Arima¹ (1.Osaka University)

[D-2-4] Study on non-destructive optical depth measurement of periodic micro-structured surfaces beyond diffraction limit

〇Yosho Kanda¹, Hiromasa Kume¹, Shotaro Kadoya¹, Masaki Michihata¹, Kiyoshi Takamasu¹, Satoru Takahashi¹ (1.The University of Tokyo)

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