Session information

Poster Sessions

B-4 Nano-scale surface finishings

[P-11] High-Resolution X-Ray Diffraction Measurement of Sapphire Substrate for Detection of Subsurface Damages

〇Hideo Aida¹, Ryo Yoshihara¹, Hidetoshi Takeda¹, Yutaka Kimura², Toshiro Doi³ (1.Nagaoka University of Technology, 2.Aoyama Gakuin University, 3.Kyushu University/Doi Laboratory Inc.)

[P-12] Relationship between removal rate and slurry content of polishing pad in high downward pressure CMP

〇Ryotaro Higashi¹, Hidetoshi Takeda¹, Hideo Aida¹ (1.Nagaoka University of Technology)

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