Session information

Poster Sessions

D-2 Surface metrologies of nano-scale structures

[P-23] Service Life prediction of line-patterned release coated silicon mold for UV-NIL

〇Tetsuma Marumo¹, Jun Taniguchi¹ (1.Tokyo University of Science)

[P-24] Stable replication technique of anti-reflection structure using high-hardness and anti-fouling UV curable resin

〇Daiki Okazaki¹, Tadashi Ando¹, Shin Hiwasa², Jun Taniguchi¹ (1.Tokyo University of Science, 2.Autex Inc.)

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