B-3 Micro/Nano machining and figurings

[B-3-1] Surface processing of a μ-channel-cut crystal monochromator for reflection self-seeding of hard X-ray free-electron laser

〇Shotaro Matsumura¹, Shota Nakano¹, Yasuhisa Sano¹, Taito Osaka², Ichiro Inoue², Satoshi Matsuyama¹, Makina Yabashi², Kazuto Yamauchi¹ (1.Osaka University, 2.RIKEN SPring-8 Center)

Keywords:Processing、X-ray crystal monochromator、Atmospheric-pressure plasma、Damage-free etching、