B-3 Micro/Nano machining and figurings

[B-3-3] An attempt of micro/nanofabrication of SiC single crystal with plasma electrolysis

〇Shunda Zhan^1,2、Jiajun Lu¹、Yonghua Zhao¹ (1.Southern University of Science and Technology、2.Harbin Institute of Technology)

キーワード：EDM/ECM/others、Wet etching、Plasma electrolysis、SiC single crystal、Micro/nanofabrication