Precise Simulation of Femtosecond Laser Processing Based on Identification of Ablation Parameters by On-Machine Measurement

[B-3-5] Precise Simulation of Femtosecond Laser Processing Based on Identification of Ablation Parameters by On-Machine Measurement

〇Hiroyuki Kawakami¹, Shunsuke Nabetani¹, Masahiro Ueda^1,2, Hideki Aoyama ¹, Kazuo Yamazaki² (1.Keio University, 2.University of California)

Keywords:Simulation、Femtosecond Laser、Ablation、Fluence、