B-3 Micro/Nano machining and figurings

[B-3-5] Precise Simulation of Femtosecond Laser Processing Based on Identification of Ablation Parameters by On-Machine Measurement

〇Hiroyuki Kawakami¹、Shunsuke Nabetani¹、Masahiro Ueda^1,2、Hideki Aoyama ¹、Kazuo Yamazaki² (1.Keio University、2.University of California)

キーワード：Simulation、Femtosecond Laser、Ablation、Fluence、