B-4 Nano-scale surface finishings

[B-4-3] Experimental Investigation of Torques Acting on Upper and Lower Platens in Double-sided Lapping

〇Ryo Ozaki¹、Yohei Hashimoto¹、Hinako Hashimoto¹、Tatsuaki Furumoto¹、Tomohiro Koyano¹、Akira Hosokawa¹ (1.Kanazawa University)

キーワード：Polishing、Torque、Slurry supplied state、Carrier、