B-4 Nano-scale surface finishings

[B-4-4] Liquid-electrolyte-free electrochemical surface finishing of GaN surface using a solid polymer electrolyte

〇Junji Murata¹、Yoshito Nishiguchi² (1.Ritsumeikan University、2.Kindai University)

キーワード：Polishing、electrochemical treatment、solid polymer electrolyte