ICPE2020

Presentation information

Oral Sessions

B-4 Nano-scale surface finishings

[B-4-5] Obtaining of atomically smooth 4H-SiC (0001) surface by optimizing anodic oxidation parameters in slurryless electrochemical mechanical polishing

〇Xu Yang1, Xiaozhe Yang1, Kentaro Kawai1, Kenta Arima1, Kazuya Yamamura1 (1.Osaka University)

Keywords:Polishing、slurryless、electrochemical mechanical polishing