Effects of ultrasonic vibration on slurryless electrochemical mechanical polishing of 4H-SiC (0001) surface

[B-4-6] Effects of ultrasonic vibration on slurryless electrochemical mechanical polishing of 4H-SiC (0001) surface

〇Xiaozhe Yang¹, Xu Yang¹, Kentaro Kawai¹, Kenta Arima¹, Kazuya Yamamura¹ (1.Osaka University)

Keywords:Polishing、slurryless、ultrasonic-assisted electrochemical mechanical polishing、ultrasonic vibration.