B-5 Non-traditional machinings and additive manufacturings

[B-5-8] Roughness evaluation of sintered AlN surface processed by plasma-assisted polishing using diamond grinding stone

〇Rongyan Sun¹、Kenta Arima¹、Kentaro Kawai¹、Kazuya Yamamura¹ (1.Osaka University)

キーワード：Polishing、 aluminum nitride (AlN)、plasma-assisted polishing (PAP)、plasma irradiation、ultra-low polishing pressure