Calibration of Rotary Encoder Mounted on Non-Contact Three Dimensional Nano-profiler Using Normal Vector Tracing Method

[D-1-11] Calibration of Rotary Encoder Mounted on Non-Contact Three Dimensional Nano-profiler Using Normal Vector Tracing Method

〇Kota Hashimoto¹, Mikiya Ikuchi¹, Takeshi Ashizawa¹, Katsuyoshi Endo¹ (1.Osaka University)

Keywords:Measurement、Rotary Encoder、Calibration、Three Dimensional Profiler、Uncertainty