ICPE2020

講演情報

Oral Sessions

D-1 Nano-scale measurements and calibrations

[D-1-11] Calibration of Rotary Encoder Mounted on Non-Contact Three Dimensional Nano-profiler Using Normal Vector Tracing Method

〇Kota Hashimoto1、Mikiya Ikuchi1、Takeshi Ashizawa1、Katsuyoshi Endo1 (1.Osaka University)

キーワード:Measurement、Rotary Encoder、Calibration、Three Dimensional Profiler、Uncertainty