ICPE2020

Presentation information

Oral Sessions

D-1 Nano-scale measurements and calibrations

[D-1-13] Vibration insensitive single-shot interferometry using a wide-field laser microscope

〇Isami Nitta1, Yosuke Tsukiyama1 (1.Niigata University)

Keywords:Measurement、vibration-insensitive、single-shot、wide-field、interferometry