D-1 Nano-scale measurements and calibrations

[D-1-8] Improvement of environmental fluctuation in sinusoidal frequency modulation interferometer for sub-nano meter displacement measurement

〇Masato Higuchi¹, Tomohiro Sowa¹, Dong Wei¹, Masato Aketagawa¹ (1.Nagaoka University of Technology)

Keywords:Measurement、sinsusoidal frequency modulation、high resolution