ICPE2020

講演情報

Oral Sessions

D-2 Surface metrologies of nano-scale structures

[D-2-1] Nano-Groove Formation on Si(111) Surfaces by Chemical Etching Assisted by Ag Nanowires

〇Zhida Ma1、Seiya Masumoto1、Kentaro Kawai1、Kazuya Yamamura1、Kenta Arima1 (1.Osaka University)

キーワード:Engineering、Nano grooves、Metal-assisted chemical etching