D-2 Surface metrologies of nano-scale structures

[D-2-1] Nano-Groove Formation on Si(111) Surfaces by Chemical Etching Assisted by Ag Nanowires

〇Zhida Ma¹, Seiya Masumoto¹, Kentaro Kawai¹, Kazuya Yamamura¹, Kenta Arima¹ (1.Osaka University)

Keywords:Engineering、Nano grooves、Metal-assisted chemical etching