D-2 Surface metrologies of nano-scale structures

[D-2-1] Nano-Groove Formation on Si(111) Surfaces by Chemical Etching Assisted by Ag Nanowires

〇Zhida Ma¹、Seiya Masumoto¹、Kentaro Kawai¹、Kazuya Yamamura¹、Kenta Arima¹ (1.Osaka University)

キーワード：Engineering、Nano grooves、Metal-assisted chemical etching