D-2 Surface metrologies of nano-scale structures

[D-2-3] Formation of Graphene with Low Pit Density on SiC Assisted by Plasma Oxidation and Its Characterization

〇Makoto Ochi¹, Ouki Minami¹, Yasuhisa Sano¹, Kentaro Kawai¹, Kazuya Yamamura¹, Kenta Arima¹ (1.Osaka University)

Keywords:Characterization、SiC、Plasma oxidation、Transfer、Graphene