D-2 Surface metrologies of nano-scale structures

[D-2-3] Formation of Graphene with Low Pit Density on SiC Assisted by Plasma Oxidation and Its Characterization

〇Makoto Ochi¹、Ouki Minami¹、Yasuhisa Sano¹、Kentaro Kawai¹、Kazuya Yamamura¹、Kenta Arima¹ (1.Osaka University)

キーワード：Characterization、SiC、Plasma oxidation、Transfer、Graphene