F-2 Micro fabrications for functional surfaces

[F-2-2] Theoretical analysis of the diffraction characteristics of dual-period holographic gratings

〇Takeru Fugono¹, Shuzo Masui¹, Shotaro Kadoya¹, Masaki Michihata¹, Satoru Takahashi¹ (1.The University of Tokyo)

Keywords:Functional surface、Subwavelength structure、Interference lithography、Holographic grating、Hierarchical structure