F-2 Micro fabrications for functional surfaces

[F-2-2] Theoretical analysis of the diffraction characteristics of dual-period holographic gratings

〇Takeru Fugono¹、Shuzo Masui¹、Shotaro Kadoya¹、Masaki Michihata¹、Satoru Takahashi¹ (1.The University of Tokyo)

キーワード：Functional surface、Subwavelength structure、Interference lithography、Holographic grating、Hierarchical structure