H-1 MEMS/NEMS

[H-1-2] Reproducible formation of graphene nanopore within 10 nm using helium ion microscope

〇Shougo Sugita¹, Tomoki Tsuji¹, Kenta Arima¹, Kazuya Yamamura¹, Kentaro Kawai¹ (1.Osaka university)

Keywords:Sensor、nanopore sequencing、graphene