C-2 Micro systems and machine elements

[P-21] Characterization of High-speed Polishing System with Small Rectangular Polisher

〇Shinsuke Matsui¹, Kouta Hiroshima¹, Harusihige Suzuki¹, Atsunobu Une² (1.Chiba Institute Technology, 2.professor emeritus at National Defense academy)

Keywords:Polishing、pad groove、aspherical